High purity fluid delivery system

摘要

A fluid delivery system includes a flow control device and a Coriolis mass flowmeter 112 in fluid communication with the flow control device 110. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller 114 provides a control output signal to the flow control device 110, which may comprise a pinch valve 120, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter 112.