IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE

摘要

The present invention relates to an imprint apparatus which performs an imprint process of forming a pattern of an imprint material on a substrate by using a mold. The imprint apparatus comprises: an imaging unit which photographs one or more images of a mold and a substrate to acquire an image; and a determination unit which determines whether an imprint process is normal or abnormal, wherein the imprint process includes a first step of supplying an imprint material onto the substrate, and a second step of allowing the imprint materials on the mold and the substrate to come in contact, and the determination unit changes the criterion of determination of normality and abnormality of the imprint process for each step of the imprint process, and determines whether the imprint process is normal or abnormal on the basis of the image photographed by the imaging unit.