发明名称 AGENT FOR REMOVING CONDUCTIVE FILM AND METHOD FOR REMOVING CONDUCTIVE FILM
摘要 Disclosed is an agent for removing a conductive film, which contains: an acid having a boiling point of 80°C or higher, a base having a boiling point of 80°C or higher, or a compound which generates an acid or a base by external energy in combination with a solvent, a resin, and a leveling agent. Also disclosed is a method for removing a conducting film, which uses the agent for removing a conductive film. The agent for removing a conductive film and the method for removing a conductive film are capable of in-place uniformity removing a desired portion of a conductive film.
申请公布号 EP2415849(A1) 申请公布日期 2012.02.08
申请号 EP20100758517 申请日期 2010.03.25
申请人 TORAY INDUSTRIES, INC. 发明人 SEKIGUCHI, HIROKI;MATA, JUNJI
分类号 C09K13/04;B82Y10/00;C09K13/06;C11D3/33;H01J9/02;H01L31/18;H05K3/06 主分类号 C09K13/04
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