| 摘要 |
PROBLEM TO BE SOLVED: To provide a core wire holder for vapor phase growth of silicon in a silicon core wire, promoting diameter growth of a lower part of a silicon rod occurring during collecting the grown silicon rod, and effectively reducing collapse of the rod at a growth time.SOLUTION: A core wire holder 3 which is attached to a bottom board of a silicon production apparatus by a Siemens method, and performs holding a silicon core wire, and electrification to the silicon core wire includes a silicon core wire insertion hole 7 for holding the silicon core wire. A heat conductive layer 8 which is constituted from a material having a heat conductivity larger than that of a material of a base material 9 constituting the core wire holder is formed in a range including an external marginal part extending in an outer circumferential direction from the edge of the silicon core wire insertion hole 7.SELECTED DRAWING: Figure 1 |
