| 摘要 |
PROBLEM TO BE SOLVED: To provide position control capable of suppressing a steady-state deviation even when a disturbance outside an estimation range of a disturbance observer occurs in sliding mode control.SOLUTION: A position controller comprises a sliding mode control unit 603, a disturbance observer 605, and a disturbance detection unit 606. The sliding mode control unit 603 performs output to a control signal output unit 104 and drive control of a linear motor 106 via a motor driver 105. A disturbance evaluation unit 607 evaluates an estimation disturbance by the disturbance observer 605 and a detection disturbance by the disturbance detection unit 606, and changes a nonlinear term gain of the sliding mode control unit 603. The disturbance evaluation unit 607 performs control so as to increase the nonlinear term gain and suppresses a steady-state deviation at the time of sliding mode control when the estimation disturbance or detection disturbance is increased.SELECTED DRAWING: Figure 6 |
