| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron detection device which allows for acquisition of a detection signal with good S/N.SOLUTION: A secondary electron detection surface (light-receiving surface) S is formed around the optical axis O of a primary electron beam in parallel with the optical axis O, and an annular spectrometer 30 is arranged on the inside of the detection surface S. On the outside of the spectrometer 30, a shield 21 having an inner surface becoming the detection surface S is provided annularly, and a scintillator 22 is provided annularly on the outside thereof. Secondary electrons emitted from a sample are converted into light in a scintillator 22, and the light emitted from the scintillator 22 is led out as a detection signal.SELECTED DRAWING: Figure 2 |
