| 摘要 |
An arrangement for producing gas tight layers, especially for coating gas porous substrates, comprises a vacuum sputter chamber (30) with at least one target (31,32) made of aluminium, and at least two gas containers (37,38) which are connected to the sputter chamber via at least one gas supply line with a closure. An arrangement for producing gas tight layers, especially for coating gas porous substrates, comprises a vacuum sputter chamber (30) with at least one target (31,32) made of aluminium, and at least two gas containers (37,38) which are connected to the sputter chamber via at least one gas supply line with a closure. The first container holds argon and the second container holds air. The layers are formed by using argon as the sputter gas and oxygen as the reactive gas, and then sputtering the aluminium target. The AlOxNy layer formed is 1-100nm thick and is embedded between two polymer layers. |
