发明名称 SINGLE-ELECTRON TRANSISTORS AND FABRICATION METHODS IN WHICH A PROJECTING FEATURE DEFINES SPACING BETWEEN ELECTRODES
摘要 A single-electron transistor includes a projecting feature, such as a pyramid, that projects from a face of a substrate. A first electrode is provided on the substrate face that extends onto the projecting feature. A second electrode is provided on the substrate face that extends onto the projecting feature and that is spaced apart from the first electrode. At least one nanoparticle is provided on the projecting feature between the first and second electrodes. Accordingly, the geometric configuration of the projecting feature can define the spacing between the first and second electrodes. The single-electron transistors may be fabricated by forming a projecting feature on a substrate that projects from a face thereof, forming a first electrode on the substrate face that extends onto the projecting feature, forming a second electrode on the substrate face that extends onto the projecting feature and that is spaced apart from the first electrode, and placing at least one nanoparticle on the projecting feature between the first and second electrodes.
申请公布号 EP1407493(B1) 申请公布日期 2012.02.08
申请号 EP20020759144 申请日期 2002.07.12
申请人 QUANTUM LOGIC DEVICES INC. 发明人 BROUSSEAU, III, LOUIS, C.
分类号 G01N27/414;H01L29/76;H01L29/06;H01L29/66;H01L29/78;H01L29/786;H01L49/00 主分类号 G01N27/414
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