发明名称 PROCEDE DE FABRICATION DE PLAQUES RECONSTITUEES AVEC MAINTIEN DES PUCES PENDANT LEUR ENCAPSULATION
摘要 A method for collectively fabricating a reconstituted wafer comprising chips exhibiting connection pads on a front face of the chip, comprises: positioning the chips on an initial adhesive support, front face on the support, vapor deposition at atmospheric pressure and ambient temperature, of an electrically insulating layer on the initial support and the chips, having a mechanical role of holding the chips, transfer of the chips covered with the mineral layer onto a provisional adhesive support, rear face of the chips toward this provisional adhesive support, removal of the initial adhesive support, overlaying the chips onto a support of “chuck” type, front faces of the chips toward this support, removal of the provisional adhesive support, deposition of a resin on the support of “chuck” type to encapsulate the chips, and then polymerization of the resin, removal of the support of “chuck” type, production of an RDL layer active face side.
申请公布号 FR2974942(B1) 申请公布日期 2016.07.29
申请号 FR20110053902 申请日期 2011.05.06
申请人 3D PLUS 发明人 VAL CHRISTIAN
分类号 H01L21/56 主分类号 H01L21/56
代理机构 代理人
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