| 发明名称 |
Ion sources, systems and methods |
| 摘要 |
The present invention refers to a system that comprises an ion source, wherein the system is capable of imaging the ion source in a first mode, and the system is capable of using the ion source to collect an image of a sample in a second mode, the sample being different from the ion source.
The figure shows a gas field ion microscopy system (100). |
| 申请公布号 |
EP2416342(A2) |
申请公布日期 |
2012.02.08 |
| 申请号 |
EP20110182539 |
申请日期 |
2006.11.15 |
| 申请人 |
ALIS CORPORATION |
发明人 |
WARD, BILLY;NOTTE IV, JOHN A.;FARKAS, LOUIS;PERCIVAL, RANDALL;HILL, RAYMOND |
| 分类号 |
H01J37/28;B82Y10/00;B82Y40/00;G01N23/225;H01J37/08;H01J37/20;H01J37/252 |
主分类号 |
H01J37/28 |
| 代理机构 |
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代理人 |
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| 主权项 |
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