发明名称 Methods for inductively-coupled RF power source
摘要 A method for tracking a variable resonance condition in a plasma coil during creation of plasma from a gas flowing in a plasma torch adjacent to the plasma coil comprises: providing a radio-frequency (RF) power source comprising a power amplifier that generates a radio-frequency power signal with an adjustable operating frequency; providing a high-voltage ignition charge from said RF power source to the gas in plasma torch so as to create an electrical discharge through said gas so as to create a test sample comprising a partial plasma state within said plasma torch; and applying an RF power signal from said plasma coil to said test sample in said plasma torch, wherein said adjustable operating frequency of said power amplifier tracks said variable resonance condition of said plasma coil such that said test sample in the plasma torch achieves a full plasma state.
申请公布号 US8110993(B2) 申请公布日期 2012.02.07
申请号 US201113092852 申请日期 2011.04.22
申请人 MATTABONI PAUL J.;MELLOR ROBERT;FLETCHER ROGER;THERMO FISHER SCIENTIFIC, INC. 发明人 MATTABONI PAUL J.;MELLOR ROBERT;FLETCHER ROGER
分类号 H05B31/26;G01R23/12 主分类号 H05B31/26
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