发明名称 |
Method and apparatus for residue detection in the edge deleted area of a substrate |
摘要 |
Apparatus and methods for detecting residue on a glass substrate and method of use are disclosed. The apparatus comprises a substrate support, a sensor, a controller and a peripheral device in communication with the controller. The apparatus measures the height or thickness of a main surface and an edge delete surface of a substrate to determine if film residue is present on the edge delete surface. |
申请公布号 |
US8111390(B2) |
申请公布日期 |
2012.02.07 |
申请号 |
US20090425806 |
申请日期 |
2009.04.17 |
申请人 |
TSAI KENNETH;SCHLEZINGER ASAF;APPLIED MATERIALS, INC. |
发明人 |
TSAI KENNETH;SCHLEZINGER ASAF |
分类号 |
G01N21/00 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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