发明名称 Laser cutting method
摘要 At least one exemplary embodiment is directed to a laser cutting method where a laser beam is condensed at internal points inside a substrate forming processing regions, and where the laser is swept along a cutting line, where the cutting line is associated with a recess on the substrate and where the recess can be formed contemporaneously with the formation of the processing regions.
申请公布号 US8108998(B2) 申请公布日期 2012.02.07
申请号 US20050273730 申请日期 2005.11.14
申请人 INADA GENJI;IRI JUNICHIRO;NISHIWAKI MASAYUKI;SUGAMA SADAYUKI;CANON KABUSHIKI KAISHA 发明人 INADA GENJI;IRI JUNICHIRO;NISHIWAKI MASAYUKI;SUGAMA SADAYUKI
分类号 H01L21/78;H01L21/30;H01L21/301 主分类号 H01L21/78
代理机构 代理人
主权项
地址