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发明名称
MULTILAYER MIRROR AND LITHOGRAPHIC APPARATUS
摘要
申请公布号
NL2007852(A)
申请公布日期
2012.02.06
申请号
NL20112007852
申请日期
2011.11.24
申请人
ASML NETHERLANDS B.V.,
发明人
YAKUNIN, ANDREI
分类号
G02B1/10;G03F7/20
主分类号
G02B1/10
代理机构
代理人
主权项
地址
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