| 摘要 |
PURPOSE: A defect classification with an optimized purity is provided to detect defects, provide a detailed feedback, and reduce the load of inspectors. CONSTITUTION: A single class classifier(64) is identified for defect classes. The defect classes are characterized by a range of inspection parameter values. A multi class classifier(70) which allocates defect to the defect classes is identified by the inspection parameter values. Inspection data is received, which is related to the defect detected in a sample. The defect applies the single and the multi class classifier to the inspection data, and is allocated to one of the defect classes. |
