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经营范围
发明名称
RETICLE COOLING IN A LITHOGRAPHIC APPARATUS.
摘要
申请公布号
NL2006674(A)
申请公布日期
2012.02.06
申请号
NL20112006674
申请日期
2011.04.28
申请人
ASML HOLDING N.V.,
发明人
NAYFEH, SAMIR
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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