Fremgangsmåde til boring af mikrohuller

摘要

Disclosed is a micro-hole structure (5) and a method for forming the micro-hole. A working energy source is projected onto a predetermined drilling site on a first surface (31) of a substrate (3) for a given period of time so as to melt a portion of the substrate (3) to form a working energy entering section (54) until the working energy source penetrates through a second surface (32) of the substrate (3) to form a micro-hole. A melt formed by melting a portion of the substrate (3) in the micro-hole next to the second surface (32) is allowed to reflow in a direction opposite to the projection of the working energy source to thereby form a reflow section (55) in the substrate (3). Further, a two or more stages emission of laser pulses is used to form the micro-hole to control the bore diameter of the micro-hole.