Graphene Synthesis Chamber And Method for Synthesizing Graphene Using The Same

摘要

PURPOSE: A graphene synthesizing chamber and a graphene synthesizing method using the same are provided to effectively suppress pollutants from being deposited on the inner and lateral side of the chamber by depositing the pollutants on a filter and exchanging the filter. CONSTITUTION: A graphene synthesizing chamber(2) includes an internal space(102) with the loading space(H) of a metal thin plate. A container part(100) with a first inlet(155) is arranged in the internal space. A heating part(200) heats heat to the loading space. A first filter(300) is arranged between the loading space and the first inlet and includes a first filter with a plurality of through holes. A method for synthesizing graphene includes the following: the metal thin plate is loaded in the loading space; the pressure of the internal space is reduced; hydrogen gas is injected into the internal space; heat is applied to the loading space; and hydrocarbon gas is injected into the first inlet.