发明名称 シート貼付装置および貼付方法
摘要 PROBLEM TO BE SOLVED: To provide a sheet sticking device and a sheet sticking method capable of sticking an adhesive sheet without causing a gap, even for a stuck body having a recess.SOLUTION: A sheet sticking device 1 includes sheet support means 3 for supporting a plastically deformable adhesive sheet MS, plastic processing means 4 for plastically deforming the adhesive sheet MS supported by the sheet support means 3 so as to match the shape of a recess WF1 in a stuck body WF provided with the recess WF1 in one surface, and press means 5 for sticking the adhesive sheet MS, subjected to plastic processing by the plastic processing means 4, to one surface of the stuck body WF by pressing.
申请公布号 JP5973203(B2) 申请公布日期 2016.08.23
申请号 JP20120077508 申请日期 2012.03.29
申请人 リンテック株式会社 发明人 木村 浩二
分类号 H01L21/683;H01L21/301 主分类号 H01L21/683
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