| 摘要 |
Disclosed are: a batch-type heat treatment device which can heat treat a plurality of substrates simultaneously, each of the substrate being heated by a plurality of heaters corresponding to the each substrate; and a heater used in the batch-type heat treatment device. The batch-type heat treatment device of the present invention comprises: a chamber (100) which provides a heat-treatment space for a plurality of substrates (10); a boat (108) for loading the plurality of substrates (10) therein and supporting the substrates (10); and a plurality of main heater units (120) disposed at predetermined intervals in the direction in which the substrates are stacked, each of the main heater units (120) comprising a plurality of individual main heaters (200), wherein the substrates (10) are disposed between the plurality of main heater units (120). |
