发明名称 FACET MIRROR DEVICE
摘要 There is provided a facet mirror device comprising a facet element and a support element, the support element supporting the facet element. The facet element comprises a curved first support section while the support element comprises a second support section, the second support section forming a support edge contacting the first support section in a region of contact to support the facet element.
申请公布号 WO2012013227(A1) 申请公布日期 2012.02.02
申请号 WO2010EP60955 申请日期 2010.07.28
申请人 CARL ZEISS SMT GMBH;HARTJES, JOACHIM 发明人 HARTJES, JOACHIM
分类号 G02B5/09;G02B5/08;G02B7/182;G03F7/20 主分类号 G02B5/09
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