MICRO/NANO COMBINED STRUCTURE, MANUFACTURING METHOD OF MICRO/NANO COMBINED STRUCTURE, AND MANUFACTURING METHOD OF AN OPTICAL DEVICE HAVING A MICRO/NANO COMBINED STRUCTURE INTEGRATED THEREWITH

摘要

The present invention relates to a micro/nano combined structure, a manufacturing method of a micro/nano combined structure, and a manufacturing method of an optical device having a micro/nano combined structure integrated therewith, the method comprising the steps of: forming a micro structure on a substrate; depositing a metal thin film on the substrate on which the micro structure is formed; heat treating and transforming the metal thin film into metal particles; and using the metal particles as a mask in order to form a non-reflective nanostructure, which has a frequency below that of light wavelengths and has a sharp wedge-shaped end, on the top surface of the substrate on which the micro structure is formed, and etching the front surface of the substrate on which the micro structure is formed, wherein the manufacturing process is simple, light reflectivity that occurs by means of a difference in refractive indices of air and semiconductor material can be minimized, and the method can easily be applied to the optical device field.