发明名称 ACTUATOR AND SUBSTRATE TRANSFER ROBOT
摘要 <P>PROBLEM TO BE SOLVED: To provide a low-cost actuator by integrating a magnet for an inner axis and a magnet for an outer axis. <P>SOLUTION: An actuator having a hollow structure with an evacuatable inner side comprises: a housing to hold a first coil part at an outer peripheral side of the hollow structure; an inner axis supported rotatably inside the housing and having a second coil part in the outer periphery; a cylindrical outer axis supported rotatably inside the housing concentrically with the rotating axis of the inner axis and positioned to surround the outer peripheral side of the inner axis; a magnet to counter the first coil part at the outer peripheral side of the outer axis and to counter the second coil part at the inner peripheral side of the outer axis; a commutator provided in the inner axis and one side of the housing; and a brush provided in the inner axis and the other side of the housing to have slidable contact with the commutator when the inner axis at least rotates. Power is supplied to the second coil part through the commutator and the brush. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012023940(A) 申请公布日期 2012.02.02
申请号 JP20100162193 申请日期 2010.07.16
申请人 CANON ANELVA CORP 发明人
分类号 H02K21/14;B25J19/00;H02K16/02;H02K21/10 主分类号 H02K21/14
代理机构 代理人
主权项
地址