| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an easily reusable long-life shield plate, for use in preparing a sectional observation sample by etching with an ion beam, to give shielding against the ion beam without necessitating flattening of sides even when no usable edge face remains after repeated use. <P>SOLUTION: A shield plate for shielding, in preparing a sectional observation sample by irradiation with an ion beam, the top face of the sample against the ion beam is prismatic in shape, has on a flank thereof an edge that makes possible mirror polishing of the sample by irradiation with the ion beam, and has a plurality of shielding members whose thickness in a direction orthogonal to the flank is not smaller than the diameter of the ion beam radiation and that are so formed integrally that the under faces form a flat shape or the shielding members and holding members that hold the shielding members are integrated. <P>COPYRIGHT: (C)2012,JPO&INPIT |
