发明名称 MACHINING APPARATUS HAVING BITE TOOL
摘要 PURPOSE: A machining apparatus having a bite tool is provided to prevent the deterioration of machining accuracy due to the thermal expansion of a chuck table by cooling down the lathe turning side of a target. CONSTITUTION: A lathe turning unit(3) comprises a movement base(31) and a spindle unit(32) which is mounted in the movement base. The spindle unit comprises a spindle housing(321), a rotating spindle(322), and a servo motor(323). The spindle housing is installed in the supporting member(313). A lathe turning unit transport mechanism(4) moves the turning unit along a pair of guide rails(221,221) up and down. The turning unit transport mechanism comprises a male screw rod(41) which is extended up and down. A chuck table(52) is comprised of a chuck table main body and an adsorption chuck which is arranged in the top side of a chuck table main body.
申请公布号 KR20120010194(A) 申请公布日期 2012.02.02
申请号 KR20110072600 申请日期 2011.07.21
申请人 DISCO CORPORATION 发明人 NAMIOKA SHINICHI
分类号 H01L21/304;H01L21/301;H01L21/60 主分类号 H01L21/304
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