| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a housing tool, in which a circular concave part having correct depth can be formed. <P>SOLUTION: The method for forming the housing tool having the circular concave part 15 and an annular convex part 17 for surrounding the circular concave part 15 comprises: a step of holding a disk-shaped member 11 on a chuck table 36; and a grinding step of abutting a grinding stone 24, which has the diameter almost equal to 1/2 of that of the disk-shaped member 11, on the center of the disk-shaped member 11 and on the inside of the outer periphery the disk-shaped member 11, and rotating the chuck table 36 and the grinding stone 24 to form the circular concave part 15 and the annular convex part 17 for surrounding the circular concave part 15 on the disk-shaped member 11. The position of the height of a machined area is detected by a first height-position detection means 44 as a first height position, and the position of the height of an outer peripheral area corresponding to the annular convex part 17 is detected by a second height-position detection means 46 as a second height position. When a value obtained by subtracting the first height position from the second height position reaches a predetermined value, the grinding work is completed. <P>COPYRIGHT: (C)2012,JPO&INPIT |
