Method and apparatus for providing image data for constructing an image of a region of a target object

摘要

Embodiments of the present invention provide a method (200) of providing image data for constructing an image of a region of a target object, comprising detecting, by at least one detector (40), at least a portion of radiation scattered by a target object (30) with the incident radiation (10) or an aperture at a predetermined probe position, determining an offset vector (203) for reducing an error associated with the probe position (201), estimating a wavefront (210) based on a probe function having the offset vector applied to the probe position, and providing image data responsive to the detected radiation.

主权项

1. A method of providing image data for constructing an image of a region of a target object, comprising:
detecting, by at least one detector of a diffractive imaging device, at least a portion of radiation scattered by the target object with the incident radiation or an aperture at a predetermined probe position; determining, by a processing unit, an offset vector for reducing an error associated with the probe position; estimating, by the processing unit, a wavefront based on a probe function having the offset vector applied to the probe position; and providing via an iterative process image data responsive to the detected radiation.