| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an energy measurement apparatus for an ultraviolet laser device, which can always stably detect an output of a laser beam. <P>SOLUTION: An energy measurement apparatus for a laser device includes a photodetector (37) for detecting an output of a laser beam and a diffusion plate (36) arranged in the front of the photodetector (37) to diffuse the laser beam made incident on the photodetector (37). In the energy measurement apparatus, the diffusion plate (36) previously irradiated with ultraviolet light to saturate a change in the permeability of the diffusion plate (36) is used. <P>COPYRIGHT: (C)2012,JPO&INPIT |
