METHOD FOR CORRECTING DEFECT OF TEMPLATE, METHOD FOR MAKING TEMPLATE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for correcting a defect of a template that can easily correct a white defect even if a pattern is miniaturized.

SOLUTION: The method for correcting a defect of a template includes a step S3 for making a second template for imprint using a first template for imprint including a white defect and a step S5 for correcting a black defect of the second template.

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