发明名称 VERTICAL TRANSISTOR PHASE CHANGE MEMORY
摘要 Vertical transistor phase change memory and methods of processing phase change memory are described herein. One or more methods include forming a dielectric on at least a portion of a vertical transistor, forming an electrode on the dielectric, and forming a vertical strip of phase change material on a portion of a side of the electrode and on a portion of a side of the dielectric extending along the electrode and the dielectric into contact with the vertical transistor.
申请公布号 WO2011133205(A3) 申请公布日期 2012.02.02
申请号 WO2011US00650 申请日期 2011.04.11
申请人 MICRON TECHNOLOGY, INC.;LIU, JUN 发明人 LIU, JUN
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
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