Method for manufacturing solar cell, involves forming phosphorous glass layer comprising sublayers on silicon substrate, where dopant concentration of lower sublayer near substrate is smaller than that of upper sublayer

摘要

The method involves forming (10,12,14) a phosphorous glass layer comprising lower and upper sublayers on a silicon substrate by diffusion of phosphorous oxychloride in carbon dioxide atmosphere. The dopant concentration of lower sublayer near the substrate is smaller than dopant concentration of upper sublayer. The emitter regions are formed in the upper sublayer by enabling (18) local diffusion of supplementary dopant of the glass layer by local heating.