发明名称 RADIATION DETECTING ELEMENT AND METHOD FOR MANUFACTURING RADIATION DETECTING ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a radiation detecting element capable of improving radiation detection sensitivity, and a method for manufacturing the radiation detecting element. <P>SOLUTION: The radiation detecting element 10 comprises a semiconductor substrate 100 consisting of a compound semiconductor capable of detecting radiation; a trench 120 provided on a surface of the semiconductor substrate 100 and gradually becoming narrower towards the inside of the semiconductor substrate 100 from the surface side; and electrodes provided on a planer region of the surface of the semiconductor substrate 100 and a surface opposed to the surface of the semiconductor substrate 100 respectively. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012023235(A) 申请公布日期 2012.02.02
申请号 JP20100160583 申请日期 2010.07.15
申请人 HITACHI CONSUMER ELECTRONICS CO LTD 发明人 TAKAHASHI ISAO;TAKASUGI SATOSHI;SUNAGA YOSHINORI;RYU SHUGEN
分类号 H01L31/09 主分类号 H01L31/09
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