| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid immersion member capable of excellently forming a liquid immersion space. <P>SOLUTION: A liquid immersion member 3 is disposed, in a liquid immersion exposure apparatus, at least at some part of the periphery of a light path of exposure light that passes through an optical member and a liquid between the optical member and an object. The liquid immersion member includes a first member 28 having a recovering port 18 for recovering at least part of a liquid on the object, a recovering flow route 19 in which the liquid recovered from the recovering port flows, a second member that faces the recovering flow route 19 and has a first outlet 21 for ejecting a liquid from the recovering flow route 19, and a third member that faces the recovering flow route 19 and has a second outlet 22 for ejecting air from the recovering flow route 19. The second member includes a first part and a second part which is disposed at a higher position than the first part and eject more liquid than the first part. <P>COPYRIGHT: (C)2012,JPO&INPIT |
