发明名称 PHOTORESIST COMPOSITION
摘要 The present invention provides a photoresist composition comprising a resin which comprises a structural unit derived from a compound having an acid-labile group and which is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid, an acid generator and a compound represented by the formula (I): wherein R1 and R2 are independently in each occurrence a C1-C12 hydrocarbon group, a C1-C6 alkoxy group, a C2-C7 acyl group, a C2-C7 acyloxy group, a C2-C7 alkoxycarbonyl group, a nitro group or a halogen atom, and m and n independently each represent an integer of 0 to 4.
申请公布号 US2012028188(A1) 申请公布日期 2012.02.02
申请号 US201113190173 申请日期 2011.07.25
申请人 ICHIKAWA KOJI;HATA MITSUHIRO;YASUE TAKAHIRO;SUMITOMO CHEMICAL COMPANY, LIMITED 发明人 ICHIKAWA KOJI;HATA MITSUHIRO;YASUE TAKAHIRO
分类号 G03F7/20;G03F7/027 主分类号 G03F7/20
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