发明名称 THIN FILM MANUFACTURING METHOD AND THIN-FILM ELEMENT
摘要 A thin film manufacturing method includes placing a substrate in a raw material solution with which a thin film is formed on a first principal plane of the substrate; forming the thin film on the first principal plane of the substrate by applying light to a first principal plane side from a light source; measuring a distance from the first principal plane of the substrate to a liquid surface of the raw material solution by applying light from the light source; and adjusting a position of the substrate in a height direction on the basis of a measurement result obtained at the measuring.
申请公布号 US2012028075(A1) 申请公布日期 2012.02.02
申请号 US201113179711 申请日期 2011.07.11
申请人 YAGI MASAHIRO;OHTA EIICHI;AKIYAMA YOSHIKAZU;TASHIRO RYOH;MACHIDA OSAMU 发明人 YAGI MASAHIRO;OHTA EIICHI;AKIYAMA YOSHIKAZU;TASHIRO RYOH;MACHIDA OSAMU
分类号 C23C16/52;B32B9/00 主分类号 C23C16/52
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