发明名称 |
THIN FILM MANUFACTURING METHOD AND THIN-FILM ELEMENT |
摘要 |
A thin film manufacturing method includes placing a substrate in a raw material solution with which a thin film is formed on a first principal plane of the substrate; forming the thin film on the first principal plane of the substrate by applying light to a first principal plane side from a light source; measuring a distance from the first principal plane of the substrate to a liquid surface of the raw material solution by applying light from the light source; and adjusting a position of the substrate in a height direction on the basis of a measurement result obtained at the measuring. |
申请公布号 |
US2012028075(A1) |
申请公布日期 |
2012.02.02 |
申请号 |
US201113179711 |
申请日期 |
2011.07.11 |
申请人 |
YAGI MASAHIRO;OHTA EIICHI;AKIYAMA YOSHIKAZU;TASHIRO RYOH;MACHIDA OSAMU |
发明人 |
YAGI MASAHIRO;OHTA EIICHI;AKIYAMA YOSHIKAZU;TASHIRO RYOH;MACHIDA OSAMU |
分类号 |
C23C16/52;B32B9/00 |
主分类号 |
C23C16/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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