| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure regulator capable of precisely and swiftly controlling pressure even when a flow fluctuation occurs at downstream. <P>SOLUTION: A pressure regulator 41 regulates flow rate of a gas, which is supplied from a gas supply source 10 into an isothermalized pressure container 13 by a servo valve 11, to maintain the pressure in the isothermalized pressure container 13 at a constant level. Here, pressure control means (computer 46) operating the servo valve 11 has a pressure control system, as a main loop, for feedback controlling the pressure in the isothermalized pressure container 13 measured by a pressure gauge 14, and has therein an inflow rate control system that controls inflow rate, an observer that estimates a difference between inflow/outflow rates, which is a difference between the inflow rate and the outflow rate at the isothermalized pressure container 13 based on the derivative of the pressure in the isothermalized pressure container 13 measured by a pressure differentiator 15, and a model follow-up control system that feeds back the estimated inflow/outflow rate difference to the inflow rate control system. <P>COPYRIGHT: (C)2012,JPO&INPIT |
