GROOVING METHOD FOR LAMINATED SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To maintain a favorable insulation property and to suppress the occurrence of defect at the edge part of a groove when forming the groove on a metallic film in the laminated substrate of a thin-film solar cell or the like.

SOLUTION: A grooving method for laminated substrates is used for forming grooves by removing a part of a metallic thin film formed on a laminated substrate, and includes a laser beam irradiation step and a laser beam scanning step. In the laser beam irradiation step, a rectangular laser beam is irradiated on the groove-planned line of the metallic thin film. In the laser beam scanning step, the laser beam is scanned along the groove-planned line so that a beam overlapping rate is in the range of >60% but ≤85%.

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