发明名称 FIELD-EFFECT TRANSISTOR
摘要 <P>PROBLEM TO BE SOLVED: To suppress a decrease in a yield. <P>SOLUTION: An insulator 130.1 is formed on at least a part of a portion of a first semiconductor layer 110 above which a second semiconductor layer 120 is not formed by forming an opening 121.1. In the opening 121.1, a source electrode S10 is formed so as to cover the insulator 130.1. The source electrode S10 is formed so as to come into contact with an interface between the first semiconductor layer 110 and second semiconductor layer 120. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012023211(A) 申请公布日期 2012.02.02
申请号 JP20100160113 申请日期 2010.07.14
申请人 PANASONIC CORP 发明人 TANAKA KENICHIRO;UEDA TETSUZO
分类号 H01L21/338;H01L21/28;H01L21/283;H01L29/778;H01L29/812 主分类号 H01L21/338
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