| 摘要 |
The present invention discloses a laser liquid level detection device with linear optical magnification of a curved minor, wherein two openings are disposed at a top of a single crystal furnace symmetrically, a laser device and a CCD detecting device are respectively disposed on the two openings, and signal processing devices are pre-disposed within the laser device and the CCD detecting device. In the liquid surface height detection method using the device of the present invention, a model is first established to simulate the laser propagating path, a polynomial curve function of the curved mirror satisfying the requirement is calculated, the prepared curved minor is then disposed in the CCD detecting device, the change in the height of the liquid surface of molten silicon may be reflected on a CCD sensor, and therefore the actual change in the height of the liquid surface of molten silicon may be calculated. When detecting a liquid surface using the laser liquid surface detection device of the present invention, the position of the liquid surface of the single crystal furnace can be detected in real time, the detection accuracy is improved, and the reading and writing of the signal is facilitated, with the advantages of high accuracy, short time for detection, low failure rate, and easy installation and operation.
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