| 发明名称 |
THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE WITH THE SAME |
| 摘要 |
A thin film deposition apparatus that may prevent a patterning slit sheet from sagging and increase a tensile force of the patterning slit sheet, and a method of manufacturing an organic light-emitting display device using the same. |
| 申请公布号 |
US2012028390(A1) |
申请公布日期 |
2012.02.02 |
| 申请号 |
US201113194759 |
申请日期 |
2011.07.29 |
| 申请人 |
LEE MYUNG-KI;LEE SUNG-BONG;CHOI MYONG-HWAN |
发明人 |
LEE MYUNG-KI;LEE SUNG-BONG;CHOI MYONG-HWAN |
| 分类号 |
H01L33/20;C23C16/455 |
主分类号 |
H01L33/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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