DEVICE FOR SETTING IMAGE ACQUISITION CONDITIONS, AND COMPUTER PROGRAM

摘要

The present invention relates to a device (303) for setting image acquisition conditions for charged particle beam devices or the like. An image integration unit (402) forms a plurality of images with a number of different integrations (number of integrations 2, 4...N) from one image (number of integrations N) acquired in advance. A pattern matching unit (403) matches the patterns of each of the plurality of images having a number of different integrations with template images registered in advance and then finds a score that shows the degree of matching between images. A selection unit (407) selects a number of integrations such that any variation in the scores is contained within a prescribed allowable range. The selected number of integrations is stored in a recipe of the device. Thus, it is possible to determine the number of integrations in the recipes without having to operate the device, and to set image acquisition conditions so as to allow a minimization of the processing time while maintaining a sufficient S / N ratio.