| 摘要 |
PURPOSE: A method for manufacturing a carbon thin film, an electronic element including the same, and an electrochemical element including the same are provided to improve the conductivity of the carbon thin film and to be used as electrodes or wirings. CONSTITUTION: A method for manufacturing a carbon thin film: a polymer film(13) is formed on a substrate(11) through a coating process; a protective film(15) is formed on the polymer film; a carbon thin film(17) is formed on the substrate by thermally treating the substrate. The substrate is silicon, silicon oxide, metal foil, stainless steel, metal oxide, highly ordered pyrolytic graphite, hexagonal boron nitride, c-plane sapphire wafer, ZnS, a polymer substrate, or the combination of the same. Polymer in the polymer film includes insulating polymer containing carbon and hydrogen. The pyrolysis temperature of the insulting polymer is lower than or equal to 600 degrees Celsius. The insulting polymer is non-conjugated main chains. |
