SENSOR ARRANGEMENT

摘要

The invention relates to a sensor arrangement, which is suitable in particular for high temperature environments. The sensor arrangement comprises a support element, which has at least one recess. A substrate is arranged on the support element. A membrane layer having one or more electrically conductive conductors is arranged over the substrate at least in the region of the recess. At least one sensor element, which is electrically conductively connected via a temperature-stable contacting means to at least one conductor, is arranged on the membrane layer.