TRANSPARENT ELECTRODE FOR THIN FILM SOLAR CELL, SUBSTRATE HAVING TRANSPARENT ELECTRODE FOR THIN FILM SOLAR CELL AND THIN FILM SOLAR CELL USING SAME, AND PRODUCTION METHOD FOR TRANSPARENT ELECTRODE FOR THIN FILM SOLAR CELL

摘要

Disclosed are a transparent electrode, which contains a zinc oxide layer wherein initial characteristics and resistance to damp after prolonged use coexist, and a thin film solar cell provided with said electrode. The transparent electrode contains a transparent conductive layer comprised primarily of zinc oxide. The following characteristics are preferable in the transparent conductive layer: an uneven surface; a carrier concentration of 9 x 1019 cm-3 or less; liquid crystals having a preferred orientation of (110); the ratio I (110)/ I (002) of the (110) peak intensity to the (002) peak intensity using X-ray diffraction being at least 50; and (110) oriented liquid crystal elements having a size of 23-50 nm in the planar direction parallel to the substrate and 30-60 nm in the planar direction perpendicular to the substrate.