| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and a device for measurement of an object to be measured to its edge peripheral part with high speed and high accuracy using an optical measurement device having line illumination and a line sensor regardless of the shape of the object. <P>SOLUTION: The surface of an object to be measured held by an holding member is irradiated with line illumination light. When the imaging of scattered light or reflective light or transmitted light from the surface of the object to be measured is performed on a light receiving part via an imaging optical system, thereby measuring the state of the object to be measured, the scattered light or reflective light or transmitted light of the line illumination light imparting on the edge peripheral part of the object to be measured is prevented from entering the light receiving part. <P>COPYRIGHT: (C)2012,JPO&INPIT |
