CARBON NANOTUBE FORMING SUBSTRATE, CARBON NANOTUBE COMPLEX, ENERGY DEVICE, METHOD FOR MANUFACTURING ENERGY DEVICE, AND APPARATUS INCLUDING ENERGY DEVICE

摘要

Provided are a substrate on which carbon nanotubes each having one end connected to the substrate can be formed at a high synthetic rate and from which the carbon nanotubes are less likely to be peeled off. The substrate is a substrate for forming the carbon nanotubes and includes a buffer layer 13 formed on at least one of surfaces of a substrate main body 14 and containing aluminum atoms and fluorine atoms. The carbon nanotube complex includes the substrate and a plurality of carbon nanotubes 11 each having one end connected to a surface of the buffer layer 13.