发明名称 |
Ceramic heaters, a method for producing the same and articles having metal members |
摘要 |
An object of the present invention is to provide a ceramic heater 2 having a ceramic sintered body 4 and a heat resistor embedded in the substrate, in which the change of the uniformity of temperature on the heating face may be reduced. The heat resistor 5A or 5B contains a metal comprising one or more metal element selected from the group consisting of IVa, Va and VIa elements of the Periodic Table and a carbide of the metal. A ratio (Ic/Im) of a total (Ic) of main peak strength of the metal carbide to a total (Im) of main peak strength of the metal being not larger than 0.2, measured by means of an X-ray diffraction method. Alternatively, (Rb-Ra)/Ra is not larger than 30 percent, where "Ra" is a resistance of the heat resistor before a sintering step and "Rb" is a resistance of the heat resistor after the sintering step. |
申请公布号 |
EP1349430(B1) |
申请公布日期 |
2012.02.01 |
申请号 |
EP20030251822 |
申请日期 |
2003.03.24 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
YAMAGUCHI, SHINJI;NOBORI, KAZUHIRO |
分类号 |
H05B3/14;H01L21/00;H05B3/12;H05B3/18;H05B3/74 |
主分类号 |
H05B3/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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