发明名称
摘要 <p>Affords a method of growing, across the entirety of a major surface of a first III-nitride crystal, a second III-nitride crystal by HVPE, in an ambient temperature higher than 1100° C. The present III-nitride crystal growth method comprises: a step of preparing a first III-nitride crystal (10) having an alkali-metal atom concentration of less than 1.0×1018 cm−3; and a step of growing a second III-nitride crystal (20) onto a major surface (10m) of the first III-nitride crystal (10) by HVPE, in an ambient temperature higher than 1100° C.</p>
申请公布号 JP4867981(B2) 申请公布日期 2012.02.01
申请号 JP20080309737 申请日期 2008.12.04
申请人 发明人
分类号 C30B29/38;C23C16/34;C30B25/20;H01L21/205;H01L21/208 主分类号 C30B29/38
代理机构 代理人
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