| 摘要 |
<p>A method and an apparatus for generating three-dimensional image data of a sample are disclosed. A first particle beam is provided for exposing a surface and a second particle beam is provided for generating an image of the surface are used. By moving the sample, it suffices if the first particle beam and/or the second particle beam are initially focused once on a surface of the sample that has already been exposed. Because all further exposed surfaces are always located in the same position, refocusing the first particle beam and/or the second particle beam is no longer required.</p> |
