| 摘要 |
PURPOSE: A non-conductive surface treatment method of an anodized susceptor is provided to prevent damage to a substrate when the substrate is adhered to a susceptor. CONSTITUTION: A non-conductive surface treatment method of an anodized susceptor is as follows. Spherical particles(30) are sprayed to the surface of a susceptor(30) with high-pressure through a nozzle(20) to form a smooth curved surface on the susceptor. The particles are silicon dioxide and have a particle size of 0.1-1mm.
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